Sculptor1820 is an advanced Laser CVD (Chemical Vapor Deposition) repair system designed for large-size FPD photomasks. It accurately repairs opaque, clear, and halftone defects, delivering excellent repair precision required for next-generation flat panel display manufacturing.
With its uniquely developed optical system, high-stability laser sources, and flexible repair functions, Sculptor1820 ensures reliable, high-quality defect repair for both large-area and minute defects.
Sculptor1820 combines high-speed laser CVD processing with high-precision positioning and pattern control to address a wide range of photomask defect types. Its dual repair approach—aperture beam for large defects and spot beam for fine defects—allows optimal repair performance without compromising accuracy.
Designed for production and advanced R&D environments, Sculptor1820 supports seamless integration with existing inspection systems and workflows.
ideal for:
High repair accuracy: Reliable Laser CVD processing
Flexible defect handling: Large and minute defects in one system
High stability: Long-life laser sources and precision stage
Process efficiency: Through-pellicle repair and step & repeat operation
Easy integration: Compatible with multiple inspection platforms
Specification | Typical Value |
Imprint Modes | Thermal (up to 250 °C) / UV (365 nm or 405 nm) |
Substrate Size | Up to Ø120 mm or Ø210 mm |
Minimum Feature Size | ~100 nm |
Supported Materials | Thermoplastics, UV resists, glass, silicon, polymers |
Operation | Manual or semi-automated |
System Size | Compact desktop configuration |
Configuration Options | 20+ variants for chamber, UV source, and control interface |
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