HTL Co. India Pvt. Ltd.

Semiconductor & Equipment Solutions

SPS POLOS Spray COATERS​

Ultrasonic Spray Coating Systems for Thin-Film Deposition

The SPS POLOS Spray Coater Series offers high-precision ultrasonic spray coating systems for uniform thin-film deposition, functional coatings, and advanced material processing. Available in benchtop, table top, and stand-alone configurations, these systems support both R&D and small-scale production environments.

Using ultrasonic atomization technology, POLOS spray coaters deliver excellent coating uniformity, high material efficiency, and repeatable process control across a wide range of substrates and coating materials.

Applications include semiconductors, MEMS, microfluidics, life sciences, advanced materials, sensors, and energy devices.

Product Specifications

Key Features

Ultrasonic Spray Technology

Produces fine, uniform droplets for controlled thin-film deposition and consistent coating quality.

Benefits

  • Uniform film thickness
  • High coating repeatability
  • Reduced overspray
  • Improved process control
High Material Efficiency

Minimizes material consumption, making it ideal for costly functional materials and research applications.

Flexible Processing

Supports wafers, glass, biochips, microfluidic devices, flexible substrates, and specialty materials.

Adjustable Spray Width

Configurable spray widths from 1 mm to 100 mm for both localized and large-area coatings.

Scalable Platform Options

Available in compact benchtop systems through to large-area stand-alone platforms.

Applications

Applications
  • Semiconductor & MEMS processing
  • Biochips and microfluidics
  • Nanomaterials and functional coatings
  • Sensors and electronic devices
  • Fuel cells and energy materials
  • University and industrial R&D
Why Choose SPS POLOS Spray Coaters?
  • Advanced ultrasonic spray technology
  • Uniform thin-film deposition
  • High material utilization
  • Spray widths from 1–100 mm
  • Substrate sizes up to 600 × 600 mm
  • Compact to production-scale configurations
  • Ideal for semiconductor and advanced materials applications
Typical Coatings
  • Functional thin films
  • Nanomaterial coatings
  • Conductive inks
  • Photoresists
  • Sensor coatings
  • Bio-functional layers
  • Energy device materials

Catalog

Product Range

Model

Maximum Spray Area / Substrate Size

Spray Width

System Type

POLOS UC320

150 × 150 mm

1 – 100 mm

Benchtop

POLOS PC320

150 × 150 mm

1 – 100 mm

Tabletop

POLOS PC330

300 × 300 mm

1 – 100 mm

Benchtop

POLOS UC330

300 × 300 mm

1 – 100 mm

Benchtop

POLOS UC340

400 × 400 mm

1 – 100 mm

Benchtop

POLOS UC360c

600 × 600 mm

1 – 100 mm

Stand-Alone

Contact us

  • Request technical specifications
  • Discuss coating materials and substrates
  • Compare available models
  • Schedule a product demonstration

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Semiconductor & Equipment Solutions

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