SPS POLOS WAFER & MASK HANDLING SOLUTIONS

SPS POLOS Wafer & Mask Handling Solutions

Cleanroom Storage, Transport & Handling Systems for Semiconductor Manufacturing

SPS POLOS offers a comprehensive range of wafer and photomask handling, storage, and transportation solutions designed for contamination-free semiconductor processing and cleanroom operation. The portfolio includes wafer shippers, storage boxes, canisters, cassettes, vacuum handling tools, and photomask handling accessories for safe substrate management throughout manufacturing and research workflows.

Engineered for semiconductor fabs, MEMS fabrication, photonics, advanced packaging, and research laboratories, these products help minimize particle contamination, handling damage, and wafer breakage while ensuring reliable cleanroom compatibility

Product Specifications

Wafer Storage & Transportation

Solutions for secure wafer storage, shipping, and cleanroom transfer:

Wafer Shippers
Wafer Jars & Canisters
Wafer Storage Boxes
Single-Wafer Containers
Multi-Wafer Storage Systems

Wafer Cassettes

Designed for safe wafer organization, transport, and process tool compatibility:

Aluminium Wafer Cassettes
Stainless Steel Wafer Cassettes
Legacy Wafer Cassettes
Standard Wafer Cassettes
300 mm Wafer Cassettes

Wafer & Mask Handling Tools

Precision handling solutions for contamination-free substrate transfer:

Portable Wands
Vacuum Wand Sets
Vacuum Tips
Wafer Picks
Small Device Handlers
Photomask Handling Tools

Key Features

Contamination-Free Handling

Designed to reduce particle generation and protect sensitive wafer surfaces during transport, storage, and processing.

Secure Wafer Protection

Helps prevent scratches, chipping, breakage, and handling damage during manufacturing and logistics operations.

Cleanroom-Compatible Construction

Manufactured using materials suitable for semiconductor and microfabrication environments.

Broad Wafer Compatibility

Supports a wide range of wafer sizes, photomasks, substrates, and semiconductor materials.

Reliable Process Integration

Compatible with laboratory, pilot production, and semiconductor manufacturing workflows.

Applications

Semiconductor Manufacturing

Safe wafer handling, storage, transport, and process tool loading across fabrication workflows.

MEMS & Advanced Packaging

Protection and transfer of delicate substrates used in MEMS, sensors, and advanced packaging applications.

Photomask Handling

Secure movement and storage of masks used in lithography and microfabrication processes.

Research & Cleanroom Laboratories

Ideal for universities, nanofabrication centres, R&D facilities, and pilot production environments.

Why Choose SPS POLOS Wafer & Mask Handling Solutions?

Cleanroom-compatible designs
Safe wafer and photomask handling
Reduced contamination and damage risk
Comprehensive storage and transport solutions
Compatible with semiconductor manufacturing workflows
Suitable for R&D, pilot production, and high-volume fabrication
Wide range of cassette, shipper, and handling tool options

Typical Applications

Wafer storage and transportation
Photomask storage and handling
Cleanroom wafer transfer
Semiconductor process workflows
MEMS and sensor fabrication
Wafer inspection and metrology
Laboratory sample management

Catalog

Product Range – Single Point Measurement

Product Number	Supported Size	Type	Configuration	ISO Class
WHS-V2-SET-SD	Small Devices & Dies	Set	Precision Handling	ISO 4
WHS-V2-SET100C	76–100 mm Wafers	Kit	Straight Grip	ISO 3
WHS-V2-SET200	150–200 mm Wafers	Set	Straight Bend	ISO 3
WHS-V2-SET200C	150–200 mm Thin/Compound Wafers	Set	Straight Bend	ISO 3
WHS-V2-SET300	300 mm Wafers	Set	Straight Bend	ISO 3

Contact us

Request technical specifications
Discuss wafer size and storage requirements
Compare cassette and shipper options
Explore cleanroom handling solutions

HTL Co. India Pvt. Ltd.

Semiconductor & Equipment Solutions