HTL Co. India Pvt. Ltd.

Semiconductor & Equipment Solutions

ARRADIANCE

Next-Generation ALD & MLD Thin-Film Deposition Platforms Atomic Precision. Scalable Performance. Breakthrough Nanofilm Engineering.

Arradiance’s advanced Atomic Layer Deposition (ALD) and Molecular Layer Deposition (MLD) systems deliver unmatched nanoscale control for research, development, and production. With compact benchtop tools and reconfigurable high-capacity platforms, Arradiance enables ultra-conformal coatings, precise film engineering, and consistent results across even the most complex 3D structures.

Whether developing novel materials, coating high-aspect-ratio substrates, or scaling nano-coating processes to production, Arradiance provides a powerful combination of precision, flexibility, and proven reliability.

Types of ALD / MLD Systems

Arradiance offers two major system families, each designed for different application scales and material challenges.

GEMStar™ XT Series – Benchtop Research Systems

Compact, versatile, and ideal for universities, R&D labs, and early-stage material development.

GEMStar XT-R (Thermal ALD)

GEMStar XT-P (PEALD)

GEMStar XT-Q (Advanced PEALD)

GEMStar XT-D (MLD & Hybrid Films)

PRIME™ Series – Scalable Production-Ready Platforms

High-capacity systems designed for complex materials, large substrates, and pilot-to-volume manufacturing.

PRIME VERDE (MLD Specialist)

PRIME PLATINUM (Advanced ALD)

PRIME CUSTOM

Product Specifications

Key Features

  • Atomic-Level Film Precision

    Self-limiting ALD/MLD chemistries ensure uniform, pinhole-free coatings with atomic-scale thickness control even on complex and high-aspect-ratio surfaces.

  • Modular, Scalable System Architecture

    Choose from benchtop GEMStar™ XT reactors to PRIME™ platforms supporting up to 14 precursor sources for thermal ALD, PEALD, and MLD.

  • Material-Agnostic Thin-Film Capability
    Depositions available for a wide range of oxides, nitrides, metals, hybrid organic-inorganic films, and polymeric MLD materials.

  • Heated & Low-Vapor-Pressure Precursor Handling

    Multiple independently heated zones and Pulsed Vapor Push™ (PVP) technology ensure stable delivery of challenging precursors.

  • Plasma or Thermal Operation

    Options for high-uniformity thermal ALD or energetic plasma-enhanced ALD with 300 W ICP sources for reactive chemistries.

  • Advanced Process Control

    GEMFlow™ provides real-time process monitoring, recipe control, and safe handling of reactive gases using RGIP™ isolation.

  • 2D & 3D Substrate Compatibility

    Process wafers, powders, foams, porous media, and complex geometries with consistent, conformal coverage.

Applications

Arradiance deposition systems are ideal for:

  • Advanced research and new material development
  • Microelectronics & semiconductors requiring conformal nanofilms
  • Energy and battery technologies including protective interfaces and catalytic layers
  • Optoelectronics & sensors needing engineered optical/electronic surfaces
  • Quantum and superconducting devices with ultra-pure, low-defect requirements
  • High-energy physics equipment, including MCP functional coatings
  • 3D and powder coating applications for industrial and scientific needs

Materials Supported

  • Aluminium alloys
  • Stainless steels
  • Titanium alloys
  • Nickel-based super-alloys
  • Copper and other specialty metals

Catalog

Technical Overview

Specification

Value / Range

Reactor Temperature

Up to ~300 °C (model dependent)

Precursor Sources

2–4 (GEMStar) / Up to 14 (PRIME)

Plasma Source

300 W ICP (PEALD models)

Process Modes

Thermal ALD, PEALD, MLD, Exposure, Flow-Through

Substrate Compatibility

Wafers up to 200 mm, M12 modules, powders, 3D structures

Precursor Delivery

Heated zones, low-vapor-pressure compatible, PVP™ boost

Gas Handling

Mass flow controlled, RGIP™ gas isolation

Automation

GEMFlow™ monitoring & recipe software

Platform Size

Benchtop to full production-scale PRIME systems

ALD/MLD Coating Services

Need coatings without purchasing equipment?
Arradiance’s Foundry provides professional ALD, PEALD, and MLD processing

  • Standard nano-films (Al₂O₃, HfO₂, TiO₂, Pt, ZnO, SnO₂, ZrO₂, etc.)
  • Custom material development through Joint Development Programs
  •  Rapid-turn R&D coatings
  • Pilot- and production-scale nano-film manufacturing
  • Full process reporting, characterization, and traceability

 

Ideal for companies, research institutions, and product developers requiring precision nano-films without internal ALD/MLD capability.

Contact us to

Learn more about GEMStar and PRIME system options
 Request a demo, sample coating, or technical consultation
Start a coating job or R&D collaboration
Discuss material development or custom nano-film engineering

HTL Co. India Pvt. Ltd.

Semiconductor & Equipment Solutions

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