Mercury is a state-of-the-art precision coordinate measuring system developed for photomasks used in Flat Panel Display (FPD) manufacturing. Designed to meet the strict accuracy demands of advanced display technologies, Mercury delivers exceptional dimensional measurement and coordinate precision.
By combining advanced optomechatronics, nanometer-level positioning control, and environmental stabilization, Mercury achieves world-class measurement accuracy and reproducibility.
Mercury enables fully automatic, high-precision measurement of critical photomask dimensions, including line width, aperture size, pitch, and coordinate positions. Its robust mechanical design and advanced calibration technology ensure reliable results even for large-format photomasks.
The system is optimized for production environments where accuracy, repeatability, and stability are essential.
Air sliders and measuring tables with high positioning accuracy and high flatness
Laser interferometer and linear encoder to control table position in nanometers
Thermal chamber to minimize environmental changes, etc.
These state-of-the-art optomechatronics enable us to achieve the world’s highest level of measurement accuracy.
In addition, accuracy calibration with original measurement software and reference mask, error factors are completely corrected, an ideal grid coordinate system is constructed, and excellent measurement accuracy and reproducibility are guaranteed.
Mercury is ideal for:
Specification | Typical Value |
Imprint Modes | Thermal (up to 250 °C) / UV (365 nm or 405 nm) |
Substrate Size | Up to Ø120 mm or Ø210 mm |
Minimum Feature Size | ~100 nm |
Supported Materials | Thermoplastics, UV resists, glass, silicon, polymers |
Operation | Manual or semi-automated |
System Size | Compact desktop configuration |
Configuration Options | 20+ variants for chamber, UV source, and control interface |
Request a demo or sample imprint
Discuss your application needs
Get configuration and pricing details
© 2026 HTL Co India Pvt. Ltd. All Rights Reserved.