Draco is the latest Focused Ion Beam (FIB) defect repair system designed for high-precision, large-size photomasks and halftone masks used in AM-OLED Flat Panel Display (FPD) manufacturing.
It delivers precise film thickness control and accurate pattern restoration, ensuring reliable defect repair even for advanced and complex mask designs.
With a compact footprint and reduced processing time, Draco provides efficient, high-quality repair performance for next-generation display production.
Draco combines advanced FIB technology with an optimized differential vacuum system, significantly reducing equipment size and mask loading time. Its high-precision control capabilities enable accurate repair of fine and complex patterns, including OPC structures, while maintaining excellent process stability.
The system is optimized for large photomasks required in modern FPD and AM-OLED applications.
ideal for:
FPD photomask defect repair
AM-OLED halftone mask repair
Advanced display manufacturing
High-precision mask rework and yield improvement
R&D and production repair environments
High repair accuracy: Precise FIB control for fine structures
Improved throughput: Reduced loading time
Compact footprint: Efficient use of cleanroom space
Pattern integrity: Accurate pattern copy for complex designs
Large mask support: Compatible with photomasks up to G10
Specification | Typical Value |
Imprint Modes | Thermal (up to 250 °C) / UV (365 nm or 405 nm) |
Substrate Size | Up to Ø120 mm or Ø210 mm |
Minimum Feature Size | ~100 nm |
Supported Materials | Thermoplastics, UV resists, glass, silicon, polymers |
Operation | Manual or semi-automated |
System Size | Compact desktop configuration |
Configuration Options | 20+ variants for chamber, UV source, and control interface |
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