HTL India customized Mask Less Optical Lithography System is in technical collaboration with world renowned company Microtech srl, Italy in the field of Maskless Lithography. Tool for direct CAD-to-substrate patterning. It can be used both for research & development and also general-purpose patterning tool for production needs. The system is completely assembled in clean room and is suited for operation up to class 10 clean rooms.
It is composed of the following parts:
• Write unit with Lens
• Control unit & optics
• Software package for user interface
• Designing software
• Camera for viewer.
Application fields of the LaserWriter
- Microelectronics
- Integrated Optics
- Diffractive Optics
- Micromechanics
- Microcryogenics
- Hybrid circuits
- Flat panel displays
- Microwave Integrated Circuits (MICs)
- MultiChip Modules (MCM)
- Photovoltaics
- Photoelectrochemistry
Main specifications of the LaserWriter :
LaserWriter specs.
Values
- Selection of write area (mm)
- Positioning accuracy (µm)
- Selectable minimum linewidth (µm)
- Exposure wavelength (nm)
- Exposure energy stabiliser
- Gray-level capability
- Automatic lens change
- Assembled in clean-room
- Video microscopy and metrology
- Writing on non-planar samples
- Writing on tilted samples
- Alignment on marks
- Selectable full manual control
- CIF, DXF, GDSII data formats
- Number of write modes
- Vibration isolation
- Safety interlocks & CE marking
- from 2″x2″ to 13″x13″
- 0.1
- from 0.6 to 8
- 405 (+375, +other)
- Yes
- 256 levels
- Yes
- Yes
- Yes
- Yes
- Yes
- manual and automatic
- Yes
- Yes
- 6
- Yes
- Yes
For enquiries, please send us an email to: sales@htlco.co.in
